Secondary Ion Mass Spectrometry: Applications for Depth Profiling and Surface Characterization

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Momentum Press, Sep 15, 2015 - Technology & Engineering - 150 pages
This book was written to explain a technique that requires an understanding of many details in order to properly obtain and interpret the data obtained. It also will serve as a reference for those who need to provide SIMS data. The book has over 200 figures and the references allow one to trace development of SIMS and understand the many details of the technique.
 

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Contents

LIST OF FIGURES
LIST OF TABLES
SIMS TECHNIQUE
INSTRUMENTATION
DEPTH PROFILING DYNAMIC SIMS
5-7
QUANTIFICATION
6-1
SURFACES INTERFACES MULTILAYERS BULK
6-23
RESIDUAL AND RARE GAS ELEMENTS
8-34
APPLICATIONS
4
INSULATORS
12
References
31
APPENDIX
41
ANALYSIS PARAMETERS
63
Copyright

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About the author (2015)

Senior Researcher, North Carolina State University

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