Ion Beam Modification of Solids: Ion-Solid Interaction and Radiation Damage

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Werner Wesch, Elke Wendler
Springer, Jul 14, 2016 - Science - 534 pages
This book presents the method of ion beam modification of solids in realization, theory and applications in a comprehensive way. It provides a review of the physical basics of ion-solid interaction and on ion-beam induced structural modifications of solids. Ion beams are widely used to modify the physical properties of materials. A complete theory of ion stopping in matter and the calculation of the energy loss due to nuclear and electronic interactions are presented including the effect of ion channeling. To explain structural modifications due to high electronic excitations, different concepts are presented with special emphasis on the thermal spike model. Furthermore, general concepts of damage evolution as a function of ion mass, ion fluence, ion flux and temperature are described in detail and their limits and applicability are discussed. The effect of nuclear and electronic energy loss on structural modifications of solids such as damage formation, phase transitions and amorphization is reviewed for insulators and semiconductors. Finally some selected applications of ion beams are given.
 

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Contents

Physical Basics
2
1 IonSolid Interaction
3
2 Models for the Description of Track Formation
63
3 Modelling Effects of Radiation Damage
105
An Overview
137
Damage Formation and Amorphization by Nuclear Energy Deposition
186
5 Primary Processes of Damage Formation in Semiconductors
187
6 Damage Formation Amorphization and Crystallization in Semiconductors at Elevated Temperatures
243
8 Swift Heavy Ion Irradiation of Crystalline Insulators and Metals
321
9 Swift Heavy Ion Irradiation of Crystalline Semiconductors
364
10 Swift Heavy Ion Irradiation of Amorphous Semiconductors
403
Selected Applications of Ion Irradiation
441
11 IonShaping of Nanoparticles
443
12 Low Energy Ion Beam Modification of Nanostructures
474
13 Modification of Structure and Properties of Optical Crystals
501
Index
529

7 Defect Accumulation Amorphization and Nanostructure Modification of Ceramics
286
Damage Formation and Amorphisation by High Electronic Energy Deposition
319

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