## Theory of Low-Temperature Plasma PhysicsThis book offers the reader an overview of the basic approaches to the theoretical description of low-temperature plasmas, covering numerical methods, mathematical models and modeling techniques. The main methods of calculating the cross sections of plasma particle interaction and the solution of the kinetic Boltzmann equation for determining the transport coefficients of the plasma are also presented. The results of calculations of thermodynamic properties, transport coefficients, the equilibrium particle-interaction cross sections and two-temperature plasmas are also discussed. Later chapters consider applications, and the results of simulation and calculation of plasma parameters in induction and arc plasma torches are presented. The complex physical processes in high-frequency plasmas and arc plasmas, the internal and external parameters of plasma torches, near-electrode processes, heat transfer, the flow of solid particles in plasmas and other phenomena are considered. The book is intended for professionals involved in the theoretical study of low-temperature plasmas and the design of plasma torches, and will be useful for advanced students in related areas. |

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### Contents

1 | |

2 Classical Theory of the Particle Scattering | 53 |

3 Quantum Mechanical Theory of the Particle Scattering | 71 |

4 Determination of the Composition Thermodynamic Properties and Transport Coefficients on the Basis of the Mean Free Path | 93 |

5 The Boltzmann Kinetic Equation and Calculation of the Transport Coefficients | 122 |

6 Numerical Methods of the Plasma Physics | 159 |

7 The RF Plasma Torches | 205 |

8 The Arc Plasma Torches | 285 |

11 The Features of the Experimental Methods and Automated Diagnostic Systems of RF and Arc Plasma Torches | 431 |

Classical Theory of the Particle Scattering | 459 |

Appendix A | 460 |

Appendix B | 466 |

Appendix C | 469 |

Appendix D | 478 |

Appendix E | 481 |

495 | |

9 Electrode Processes in the Arc Plasma Torches | 367 |

10 Heat Exchange and Movement of the Solid Particles in the Plasma | 399 |

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### Common terms and phrases

anode approximation Arc plasma argon argon plasma atom–ion axis balance energy boundary conditions calculation cathode cathode surface channel collisions continuity equation control volume cross section current density ð Þ depending determined diffusion discharge discrete analogue distribution elastic collisions electric Arc electric field electromagnetic field electromagnetic force electron gas electron temperature emission energy balance equation of ionization equilibrium plasma evaporation experimental data free Arc gas flow gradient grid heat inductor integrals interaction internal feedback ionization equilibrium kinetic l/min low-temperature plasma magnetic field method momentum equation obtained one-dimensional optical parameters particles Phys physical processes plasma flow Plasma Physics plasma processes points radiation radius recombination RF plasma torch Saha equation scattering Sect shown in Fig simulation solution solving source function spectral lines stability taking into account thermal conductivity thermodynamic turbulent two-dimensional two-temperature vector potential velocity viscosity voltage zone