Fringe Pattern Analysis for Optical Metrology: Theory, Algorithms, and Applications

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John Wiley & Sons, Aug 18, 2014 - Science - 327 pages
The main objective of this book is to present the basic theoretical principles and practical applications for the classical interferometric techniques and the most advanced methods in the field of modern fringe pattern analysis applied to optical metrology. A major novelty of this work is the presentation of a unified theoretical framework based on the Fourier description of phase shifting interferometry using the Frequency Transfer Function (FTF) along with the theory of Stochastic Process for the straightforward analysis and synthesis of phase shifting algorithms with desired properties such as spectral response, detuning and signal-to-noise robustness, harmonic rejection, etc.
 

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Contents

Digital Linear Systems
1
A 4
4
A 8
8
6
23
5
29
2
37
Synchronous Temporal Interferometry
57
3
92
A 2
132
Spatial Methods with Carrier
149
5
201
6
241
Appendix A List of Linear PhaseShifting Algorithms PSAs
271
FourStep Linear PSAs
277
Zero at ajo a0 12
298
References
315

8
101
Asynchronous Temporal Interferometry
107

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About the author (2014)

Manuel Servin received his engineering diploma from the Ecole Nationale Superieure des Telecommunications in France (1982), and his Ph.D. from the Centro de Investigaciones en Optica A. C. (CIO) at Leon Mexico in 1994. He is co-author of the book `Interferogram Analysis for Optical Testing'. Dr. Servin has published more than 100 papers in scientific peer-reviewed journals on Digital Interferometry and Fringe Analysis.

Juan Antonio Quiroga received his Ph.D. in physics in 1994 from the Universidad Complutense de Madrid, Spain. He is now teaching there at the Physics Faculty. His current principal areas of interest are Digital image processing applied to Optical Metrology and applied optics

Moises Padilla is a Ph.D. student in optical sciences at the Centro de Investigaciones en Optica (CIO) at Leon Mexico. He is associated with the optical metrology division of the CIO. His research activities are in digital signal processing and electrical communication engineering applied to processing and analysis of optical interferogram images.

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