Scanning Electron Microscopy: Physics of Image Formation and Microanalysis

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Springer, Nov 11, 2013 - Science - 529 pages
Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
 

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Contents

Introduction
1
Electron Optics of a Scanning Electron Microscope
13
Focusing
46
Electron Scattering and Diffusion
57
Emission of Backscattered and Secondary Electrons
135
Electron Detectors and Spectrometers
171
Image Contrast and Signal Processing 207
206
ElectronBeamInduced Current
253
Special Techniques in SEM
289
Crystal Structure Analysis by Diffraction
329
Elemental Analysis and Imaging with XRays 379
378
References
449
Index
515
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