Google Books Ngram Viewer

Graph these comma-separated phrases:
case-insensitive
between and from the corpus with smoothing of .  
Search in Google Books:

1700 - 1797 1798 - 1961 1962 - 1973 1974 - 1987 1988 - 2000 vacuum English
1700 - 1923 1924 - 1977 1978 - 1984 1985 - 1991 1992 - 2000 vacumn English

Run your own experiment! Raw data is available for download here.
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